Kyoto University · Medicine
Professor Hiroki Tanaka's research lab specializes in advanced plasma-based light sources, particularly focusing on extreme ultraviolet (EUV) generation using laser-produced plasmas for next-generation optical lithography. The lab investigates the emission characteristics and conversion efficiency of EUV radiation from CO₂ and Nd:YAG laser-produced plasmas with tin and xenon targets, aiming to optimize source performance for industrial scalability. Additionally, the lab explores biofilm reactor systems for wastewater treatment, specifically analyzing nitrification kinetics under varying environmental conditions. The research spans both high-energy physics applications and environmental engineering, with a strong emphasis on experimental characterization and process optimization.
Figures are computed from collected data and may differ slightly.
The direct comparison of the emission characteristics of an extreme ultraviolet (EUV) light between the CO2 and the Nd:YAG laser-produced plasmas (LPP) with a solid tin target is reported. In the case of the Nd:YAG LPP, the conversion efficiency (C.E.) peaked at a laser intensity of about 5×1010W∕cm2 and decreased at higher laser intensity. In the case of the CO2 LPP, the C.E. monotonically increased up to 2×1010W∕cm2, where the C.E. is comparable to the maximum C.E. of the Nd:YAG LPP. The spect
The reaction rates (r(NH(4) (+) ) and r(NO(2) (-) )) in the two-step nitrification reaction were measured in a fluidized-sand-bed biofilm reactor under a range of steady-state conditions with respect to bulk NH(4) (+), NO(2) (-), and O(2) concentrations. It was shown from theory and experiment that under low NH(4) (+) concentration conditions, if the O(2)/NH(4) (+) concentration ratio in the bulk liquid is less than the stoichiometric coefficient (3.4 mg/mg), then oxygen will be rate limiting. I
We propose a CO 2 laser-produced plasma as the extreme ultraviolet (EUV) light source for a future optical lithography system. The EUV radiation around 13.5 nm was generated by focusing the laser beam from a transversely-excited atmospheric CO 2 laser (4 J, 50 ns full width at half-maximum (FWHM)) on a Xe gas target and a Xe cryogenic target. The EUV energy was measured by a Flying Circus II detecting system, and an output energy of more than 3 mJ/pulse and an conversion efficiency of more than
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