Tokyo Institute of Technology · 재료과학
Mutsuko Hatano 교수의 연구실은 반도체 소자 및 전기차용 고성능 센서 기술을 중심으로 연구를 진행하고 있습니다. 레이저를 이용한 실리콘 박막 재결정화 기술과 함께, 나노구조 다이아몬드 내 질소빈약 중심(NV 중심)을 활용한 양자 센서 기반 전류·온도 측정 기술을 개발하고 있습니다. 특히 전기차의 배터리 수명 연장과 효율 향상을 위한 실시간 모니터링 기술에 초점을 맞추고 있으며, 고정밀·소형화된 양자 센서 헤드를 실현했습니다.
표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.
The liquid/solid interface motion and temperature history during excimer laser annealing of 50-nm-thick Si films on fused quartz substrates are investigated by in situ nanosecond time-resolved electrical conductance, optical reflectance, and transmittance at visible and near-IR wavelengths, combined with thermal emission measurements. The temperature response, melt propagation and evolution of the recrystallization process are fundamentally different in the partial-melting and the complete-melti
Energy conservation and battery life extension are key challenges for the next-generation hybrid electric vehicles. In particular, the temperature and electric currents in a storage battery need to be monitored simultaneously with ∼1 kHz signal bandwidth for optimum battery usage. Here we introduce a centimeter-scale portable quantum sensor head, consisting of a diamond substrate hosting an ensemble of nitrogen-vacancy (NV) color centers with a density of ∼3 × 1017 cm−3. One diamond surface is a
Abstract A novel method for laser‐recrystallized poly‐Si layer formation is proposed. The pulse‐duration‐controlled solid‐state laser is utilized to enhance the lateral crystal growth, and an excimer‐ laser‐crystallized poly‐Si layer is used as a precursor. The validity of the method is confirmed by superior TFT characteristics of high field‐effect mobility (n‐ch TIT:μ > 460 cm 2 /Vs, p‐ch TFT: μ > 150 cm 2 /Vs) with low threshold voltage deviation (Vth: 3 σ < 0.25 V).
We characterized the excited state (ES) and the ground state (GS) of negatively charged silicon vacancy (VSi−) centers in hexagonal silicon carbide (4H-SiC) using optically detected magnetic resonance (ODMR) to realize thermometric quantum sensors. We report the observation of inverted contrast between ODMR signals of the ES and the GS and clarify the effect of energy sublevels of spin states in 4H-SiC. We confirm that ES ODMR signals of VSi− centers are dependent on the temperature with a therm
Gate-overlapped LDD poly-Si TFT fabricated by using poly Si-sidewall gates self-alignment process (Sa-GOLD), is proposed. The Sa-GOLD TFTs are suitable for high-speed operation because of small overlapping capacitance and large transconductance. Furthermore, they can reduce the drain electric field, and provide high reliability against drain-avalanche hot-carrier.
Considering the rising popularity of electric vehicles (EVs), it is essential to enhance the cruising mileage and extend the lifetime of batteries. To accomplish this, accurate monitoring of the charge and discharge current of the battery over a wide temperature range is essential. We developed a compact diamond quantum sensor head with a size of 1 × 1 × 0.5 cm3, consisting of a (111) high-pressure and high-temperature synthesized diamond with nitrogen-vacancy centers, by electron beam irradiati
Abstract Magnetic field imaging of magnetic particles using diamond sensors with nitrogen-vacancy (NV) centers has the potential to become a new prominent living-cell observation method, because of the reduction of photodamage to cells. To realize a higher signal-to-noise ratio of magnetic detection, perfectly aligned and high-density NV centers in the diamond are required because they are effective in reducing optical shot noise. In this study, diamond films were grown by microwave plasma CVD o