東北大学 · Engineering
Nguyễn Văn Toàn 교수의 연구실은 나노소재 및 박막 기반의 전자 소자 개발에 중점을 두고 있으며, 특히 알루미늄 doping된 zinc oxide(AZO) 박막, 반도체 기반 마이크로/나노 기계 구조물, 그리고 유연한 열전 발전소를 포함한 고성능 소자 설계에 힘쓰고 있습니다. 중력이 아닌 중성비드 에칭(NBE) 및 반응성 이온 에칭(RIE)을 활용한 정밀 마이크로머신 제작 기술과 함께, 고품질의 진동자 및 열전소자에 대한 기초 연구를 진행하고 있습니다. 특히 무선 IoT 기기와 웨어러블 디바이스를 위한 에너지 수확 기술에 초점을 맞추고 있어 응용 가능성이 높습니다.
표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystal
It was found that there was a geographical inequity in use of public health services while there was relatively equal use of these services between social, gender, and ethnic groups. Long distance in combination with failure of the fee exemption may increase inequity in use of health services in remote and isolated areas. These observations contribute to the basis for implementation of the Vietnamese health policy, emphasizing efficiency and equity.
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax
The fabrication and evaluation of silicon micromechanical resonators using neutral beam etching (NBE) technology is presented. An etching technique based on a low energy neutral beam of Cl2/F2/O2 is introduced for making nano-trench patterns on 5 µm-thick silicon. The NBE technology has been investigated to form a highly-anisotropic etching shape. A 5 μm-deep trench pattern having smooth side walls with a gap width of 230 nm is achieved by using NBE. Additionally, a fabrication method for silico
Thermoelectric generator (TEG) has a great potential for powering wireless Internet of Things (IoT) sensing systems and wearable electronic devices because of its capability of harvesting thermal energy into usable electricity. Herein, this work reports a high-performance ultra-flexible TEG based on a silicone rubber sheet and electrodeposited thermoelectric material. The fabricated flexible TEG shows a high output voltage of 1V under a temperature difference ΔT of 60 °C. Its maximum output powe
