Nong‐Moon Hwang
서울대학교 Materials Science and Engineering · 재료과학
Nong-Moon Hwang 교수의 연구실은 화학기상증착(CVD)을 통한 박막 및 나노구조체 성장 메커니즘과 고체상화학적 상평형 연구에 중점을 두고 있습니다. 특히, 입자상 핵의 전하 상태가 박막 성장에 미치는 영향과, 고온에서의 산화물 및 산화할라이드 코팅의 안정성 및 내식성에 대한 기초 연구를 수행하고 있습니다. 또한, 스퍼전 플라즈마 스프레이를 활용한 YOF(Yttrium Oxyfluoride) 코팅의 제조 및 반도체 공정에 적합한 내가공성 물질 개발에도 기여하고 있습니다.
표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.
The phase equilibria of the systems SrO‐CuO and SrO‐1/2Bi 2 O 3 were studied by X‐ray diffraction analysis of quenched powder samples. The compounds SrCuO 2 and Sr 2 CuO 3 melt incongruently at 1085° and 1225°C, respectively. The newly found compound Sr 6 Bi 2 O 9 decomposes at 965°C into SrO and Sr 3 Bi 2 O 6 melts incongruently into SrO and liquid at 1210°C. SrBi 2 O 4 undergoes a phase transition at ∼825°C, and although both are nonstoichiometric, the low‐temperature phase is slightly poorer
AbstractA cauliflower structure is a granular film composed of spherical particles similar in size, each with numerous nanoscale nodules on its surface. The structure is produced during certain chemical vapour deposition (CVD) processes for diamond and silicon thin film growth. A classical account in terms of atomic unit deposition fails to explain the growth of such a cauliflower structure, as it requires a gas phase of much higher supersaturation than for onset of diffusion controlled growth.
The critical role of charged nanoclusters and nanoparticles in the growth of thin films and nanostructures by chemical vapour deposition (CVD) is reviewed. Advanced nanoparticle detection techniques have shown that charged gas-phase nuclei tend to be formed under conventional processing conditions of thin films and nanostructures by thermal, hot-wire and plasma CVD. The relation between gas-phase nuclei and thin film and nanostructure growth has not been clearly understood. In this review it wil
