東京工業大学 · Engineering
Saulius Juodkazis 교수의 연구실은 초단백질 레이저를 활용한 나노재료 가공 및 3차원 마이크로/나노 구조 제작을 핵심으로 하며, 특히 광학적 특성이 뛰어난 유기-무기 복합 소재를 기반으로 한 고해상도 3D 레이저 리소그래피 기술을 개발하고 있습니다. 고강도 레이저가 유도하는 초고압·초고온 상태나 표면 나노텍스처링, 광학적 안정성 높은 마이크로렌즈 제작 등 응용 분야로는 포토닉 크리스탈, 마이크로옵트로플루이딕 시스템, 태양전지 및 생체재료 가공 등이 포함됩니다. 연구는 실험적 접근과 물리 메커니즘 분석을 결합하여 산업적 적용 가능성을 고려한 기초-응용 연구를 추구합니다.
표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.
Extremely high pressures ($\ensuremath{\sim}10\text{ }\text{ }\mathrm{TPa}$) and temperatures ($5\ifmmode\times\else\texttimes\fi{}{10}^{5}\text{ }\text{ }\mathrm{K}$) have been produced using a single laser pulse (100 nJ, 800 nm, 200 fs) focused inside a sapphire crystal. The laser pulse creates an intensity over ${10}^{14}\text{ }\text{ }\mathrm{W}/{\mathrm{cm}}^{2}$ converting material within the absorbing volume of $\ensuremath{\sim}0.2\text{ }\text{ }\ensuremath{\mu}{\mathrm{m}}^{3}$ into p
Studies on two-photon lithography in negative SU-8 photoresist demonstrate the possibility of obtaining mechanically stable, stress-free, extended nanorods having lateral sizes of about 30 nm (corresponding to λ/25 resolution). The high resolution achievable with the given combination of materials and fabrication techniques demonstrates its potential for the fabrication of large-scale nanostructures, such as photonic crystals with photonic stop gaps at visible wavelengths.
Femtosecond laser fabrication of three-dimensional structures for photonics applications is reviewed. Fabrication of photonic crystal structures by direct laser writing and holographic recording by multiple beam interference techniques are discussed. The physical mechanisms associated with structure formation and postfabrication are described. The advantages and limitations of various femtosecond laser microfabrication techniques for the preparation of photonic crystals and elements of microelec
Nanoscale surface texturing, drilling, cutting, and spatial sculpturing, which are essential for applications, including thin-film solar cells, photonic chips, antireflection, wettability, and friction drag reduction, require not only high accuracy in material processing, but also the capability of manufacturing in an atmospheric environment. Widely used focused ion beam (FIB) technology offers nanoscale precision, but is limited by the vacuum-working conditions; therefore, it is not applicable
Amorphous regions in sapphire with sub-micrometer 3D resolution have been produced at the focus of a single femtosecond laser pulse. Crystalline- to-amorphous and amorphous-to-polycrystalline transitions (crystalline and amorphous regions are marked C and A in the HRTEM image) are induced by single- and multi-pulse irradiation, respectively. The wet-etching selectivity for the amorphous phase is significantly greater than that for the crystalline phase in aqueous HF.
We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed e
The nanostructuring of materials to create bactericidal and antibiofouling surfaces presents an exciting alternative to common methods of preventing bacterial adhesion. The fabrication of synthetic bactericidal surfaces has been inspired by the anti-wetting and anti-biofouling properties of insect wings, and other topologies found in nature. Black silicon is one such synthetic surfaces which has established bactericidal properties. In this study we show that time-dependent plasma etching of sili
We report on the nanovoid formation inside synthetic silica, viosil, by single femtosecond pulses of 30–100nJ energy, 800nm wavelength, and 180fs duration. It is demonstrated that the void is formed as a result of shock and rarefaction waves at pulse power much lower than the threshold of self-focusing. The shock-compressed region around the nanovoid is demonstrated to have higher chemical reactivity. This was used to reveal the extent of the shock-compressed region by wet etching. Application p
An approach enabling nanoscale-additive manufacturing of inorganics based on phase transition <italic>via</italic> calcination of laser structured hybrid resin is proposed.
A 3D printing fused filament fabrication (FFF) approach has been implemented for the creation of microstructures having an internal 3D microstructure geometry. These objects were produced without any sacrificial structures or additional support materials, just by precisely tuning the nozzle heating, fan cooling and translation velocity parameters. The manufactured microporous structures out of polylactic acid (PLA) had fully controllable porosity (20%–60%) and consisted of desired volume pores (