Yuki Shimizu

Abstract Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating, which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors. Especially, optical configurations such as Lloyd’s mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a

Abstract Optical metrology is one of the key technologies in today’s manufacturing industry. In this article, we provide an insight into optical measurement technologies for precision positioning and quality assessment in today’s manufacturing industry. First, some optical measurement technologies for precision positioning are explained, mainly focusing on those with a multi-axis positioning system composed of linear slides, often employed in machine tools or measuring instruments. Some optical

In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical

An ultra-sensitive angle sensor employing single-cell photodiodes, which allows tighter focusing leading to a higher angular resolution better than 0.001 arc-second, has been designed based on laser autocollimation. Aiming to investigate the influences of spherical aberrations in the optical system on the sensor sensitivity, an optical model has been established based on wave optics. Computer simulation has been carried out by using the model, and its feasibility has been verified in experiments

This paper presents a design study of a four-probe optical sensor head for a three-axis surface encoder with a mosaic scale grating. As the mosaic scale grating, multiple two-dimensional reflective-type scale gratings are aligned in a matrix on a plane so that measurement ranges of the three-axis surface encoder along the X- and Y-axes can be extended. An optical layout for a four-probe unit, which consists of a laser diode and two beam splitters, was designed based on geometrical optics so that

A variable-focus lens using a combination of liquid crystals and ultrasound is discussed. The lens uses a technique based on ultrasound vibration to control the molecular orientation of the liquid crystal. The lens structure is simple, with no mechanical moving parts and no transparent electrodes, which is helpful for device downsizing; the structure consists of a liquid crystal layer sandwiched between two glass substrates with a piezoelectric ring. The tens-of-kHz ultrasonic resonance flexural

Targeting both higher touchdown sensitivity and highly accurate nanometer-scale defect detection on a disk surface, a thermal-contact sensor, integrated into a magnetic-head slider, was developed. It was experimentally shown that the contact sensor has sensitivity for detecting head-disk contact at each radial position on a disk surface equivalent to that of a conventional acoustic-emission (AE) sensor. It was also shown that a defect-detection method using the thermal-contact sensor is feasible

A mode-locked femtosecond laser, which is often referred to as the optical frequency comb, has increasing applications in various industrial fields, including production engineering, in the last two decades. Many efforts have been made so far to apply the mode-locked femtosecond laser to the absolute distance measurement. In recent years, a mode-locked femtosecond laser has increasing application in angle measurement, where the unique characteristics of the mode-locked femtosecond laser such as