東京大学 · 工学
Takai教授の研究室では、半導体プロセスに応用可能なプラズマプロセスの基礎を解明するとともに、マイクロ流体デバイスにおける生体適合性界面の設計や、次世代磁気記録素子に向けた電気析出法による高機能磁性膜の開発を進めています。特に、プラズマ中の電子温度制御や、自己整合的表面修飾による非特異的タンパク質吸着抑制、ナノ結晶構造を有する高効率磁性膜の創出が主な研究テーマです。
Figures are computed from collected data and may differ slightly.
Electron temperature measured by an optical-emission spectroscopy shows a strong substrate temperature dependence in a silane glow-discharge plasma. The electron temperature increases with time after turning on the plasma at a low substrate temperature of 150 °C, while it stays constant at a high substrate temperature of 400 °C. The electron temperature is drastically reduced when the source gas silane is diluted with hydrogen at low substrate temperatures. These results suggest that the electro
A type of charged phospholipid polymer biointerface was constructed on a quartz microfluidic chip to control the electroosmotic flow (EOF) and to suppress non-specific protein adsorption through one-step modification. A negatively charged phospholipid copolymer containing 2-methacryloyloxyethyl phosphorylcholine (MPC), n-butyl methacrylate (BMA), potassium 3-methacryloyloxypropyl sulfonate (PMPS) and 3-methacryloxypropyl trimethoxysilane (MPTMSi) moieties (referred to as PMBSSi) was synthesized
A soft magnetic CoNiFeS film as a write head core material for the next generation was prepared by electrodeposition. In this system, thiourea was used as an additive in the CoNiFe ternary alloy plating bath. The most suitable magnetic properties were obtained at the film composition of [atomic percent (a/o)] with a high saturation magnetic flux density of 1.7 T, a high resistivity (ρ) of 51 μΩ cm, and a low saturation magnetostriction (λs) of . The film consisted of fine minute crystal grains 5
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