Nguyễn Văn Toàn

This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystal

It was found that there was a geographical inequity in use of public health services while there was relatively equal use of these services between social, gender, and ethnic groups. Long distance in combination with failure of the fee exemption may increase inequity in use of health services in remote and isolated areas. These observations contribute to the basis for implementation of the Vietnamese health policy, emphasizing efficiency and equity.

This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax

The fabrication and evaluation of silicon micromechanical resonators using neutral beam etching (NBE) technology is presented. An etching technique based on a low energy neutral beam of Cl2/F2/O2 is introduced for making nano-trench patterns on 5 µm-thick silicon. The NBE technology has been investigated to form a highly-anisotropic etching shape. A 5 μm-deep trench pattern having smooth side walls with a gap width of 230 nm is achieved by using NBE. Additionally, a fabrication method for silico

Thermoelectric generator (TEG) has a great potential for powering wireless Internet of Things (IoT) sensing systems and wearable electronic devices because of its capability of harvesting thermal energy into usable electricity. Herein, this work reports a high-performance ultra-flexible TEG based on a silicone rubber sheet and electrodeposited thermoelectric material. The fabricated flexible TEG shows a high output voltage of 1V under a temperature difference ΔT of 60 °C. Its maximum output powe