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Donghyuk Shin

Yonsei University · 工学

研究室紹介

Professor Donghyuk Shin's research lab specializes in advanced semiconductor materials and nanofabrication technologies, with a strong focus on next-generation DRAM devices and atomic layer deposition (ALD) processes. The lab pioneers innovative transistor structures such as S-RCAT and 6F² open-bit-line cells to enhance scalability and performance in sub-50nm memory technologies. It also conducts fundamental research on high-k dielectrics, refractory metal films (e.g., Mo, TiO₂), and ALD process optimization for advanced logic and memory applications. The lab integrates materials characterization, device physics, and process engineering to address critical challenges in semiconductor scaling and reliability.

DRAM technologyatomic layer depositionhigh-k dielectricssemiconductor materialsnanofabrication

Research Overview

Papers
24
Total Citations
93
Papers (5y)
11
Primary Field
工学

Research Output Trend

Figures are computed from collected data and may differ slightly.

Publications per year (5y)
11total
2022
2023
2024
2025
2026
Citations per year (5y)
19total
20222023202420252026

Selected Papers

15
1
Article|38 citations·2005
S-RCAT (sphere-shaped-recess-channel-array transistor) technology for 70nm DRAM feature size and beyond
Young‐Wook Kim, H.J. Oh, D. S. Woo, Y.S. Lee, D.H. Kim, S.E. Kim, Gyongsik Ha, Hyojung Kim, Nam-Soo Kang, J.M. Park, Young‐Ha Hwang, D.I. Kim

For the first time, S-RCAT (sphere-shaped-recess-channel-array transistor) technology has been successfully developed in a 2Gb density DRAM with 70nm feature size. It is a modified structure of the RCAT (recess-channel-array transistor) and shows an excellent scalability of recessed-channel structure to sub-50nm feature size. The S-RCAT demonstrated superior characteristics in DIBL, subthreshold swing (SW), body effect, junction leakage current and data retention time, comparing to the RCAT stru

Electrical and Electronic EngineeringEngineering
2
Article|14 citations·2018
Plasma-enhanced atomic layer deposition of low temperature silicon dioxide films using di-isopropylaminosilane as a precursor
Donghyuk Shin, Heungseop Song, Minhyung Lee, Heungsoo Park, Dae‐Hong Ko
SJR Q2Thin Solid Films
Electrical and Electronic EngineeringEngineering
3
Article|8 citations·2024
Properties of low-resistivity molybdenum metal thin film deposited by atomic layer deposition using MoO2Cl2 as precursor
So Young Kim, Chunghee Jo, Hyerin Shin, Dongmin Yoon, Donghyuk Shin, Min-ho Cheon, Kyu-Beom Lee, Dongwon Seo, Jae-Wook Choi, Heungsoo Park, Dae‐Hong Ko
SJR Q2Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsOA

Challenges have arisen in selecting suitable candidates for interconnects and metal contacts due to the exponential increase in metal resistivity at scaled pitches. Molybdenum (Mo) has emerged as a promising alternative to the traditional metals such as copper or tungsten owing to its low electrical resistivity and electron mean free path. In this study, we investigated the formation of a molybdenum film grown by thermal atomic layer deposition (ALD) using a MoO2Cl2 solid precursor and H2 and NH

Electrical and Electronic EngineeringEngineering
4
Article|8 citations·2019
Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
Heungseop Song, Donghyuk Shin, Ji-eun Jeong, Heungsoo Park, Dae-Hong Ko
SJR Q3AIP AdvancesOA

Titanium dioxide (TiO2) films were deposited by plasma enhanced atomic layer deposition (PE-ALD) system using tetrakis-dimethylamido-titanium (TDMAT) at 250 °C. We applied a new source feeding method, known as Discrete Feeding Method (DFM), to PE-ALD TiO2 process for comparing the deposition rate, the physical and electrical film properties with the films deposited by conventional ALD method. Various analytical studies were carried out to investigate the change of TiO2 thin film characteristics

Electrical and Electronic EngineeringEngineering
5
Article|8 citations·2005
High-density low-power-operating dram device adopting 6F/sup 2/ cell scheme with novel S-RCAT structure on 80nm feature size and beyond
H.J. Oh, J.Y. Kim, J.H. Kim, S.G. Park, D.H. Kim, S.E. Kim, D. S. Woo, Y.S. Lee, Gyongsik Ha, J.M. Park, Nam-Soo Kang, Hyojung Kim

For the first time, the DRAM device composed of 6F/sup 2/ open-bit-line memory cell with 80nm feature size is developed. Adopting 6F/sup 2/ scheme instead of customary 8F/sup 2/ scheme made it possible to reduce chip size by up to nearly 20%. However, converting the cell scheme to 6F/sup 2/ accompanies some difficulties such as decrease of the cell capacitance, and more compact core layout. To overcome this strict obstacles which are originally stemming from the conversion of cell scheme to 6F/s

Electrical and Electronic EngineeringEngineering
6
Article|8 citations·2023
Study on temperature-dependent growth characteristics of germanium oxide film by plasma-enhanced atomic layer deposition
Donghyuk Shin, Heungsoo Park, So Young Kim, Dae-Hong Ko
SJR Q2Thin Solid Films
Electrical and Electronic EngineeringEngineering
7
Article|3 citations·2020
Epitaxial growth of a silicon capping layer to mitigate roughness after the selective chemical etching of Si1-xGex
Hyun‐Woo Lee, Yongjoon Choi, Donghyuk Shin, Dae-Seop Byeon, Dae‐Hong Ko
SJR Q2Thin Solid Films
Electrical and Electronic EngineeringEngineering
8
Preprint|2 citations·2023
Structural insights into ubiquitin chain cleavage by Legionella ovarian tumor deubiquitinases
Sangwoo Kang, Gyuhee Kim, Minhyung Choi, Minwoo Jeong, Gerbrand J. van der Heden van Noort, Soung‐Hun Roh, Donghyuk Shin
bioRxiv (Cold Spring Harbor Laboratory)OA

ABSTRACT Although ubiquitin is found only in eukaryotes, several pathogenic bacteria and viruses possess proteins that hinder the host ubiquitin system. Legionella , a gram-negative intracellular bacterium, possesses an ovarian tumor (OTU) family of deubiquitinases (Lot DUBs). Herein, we describe the molecular characteristics of Lot DUBs. We elucidated the structure of LotA OTU1 domain and revealed that entire Lot DUBs possess a characteristic extended helical lobe (EHL) that is not found in oth

Molecular BiologyBiochemistry, Genetics and Molecular Biology
9
Article|2 citations·2019
Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
Donghyuk Shin, Heungseop Song, Ji‐Eun Jeong, Heungsoo Park, Dae‐Hong Ko
SJR Q2Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Silicon dioxide films were deposited using di-isopropylaminosilane and Ar/O2 plasma by the plasma enhanced atomic layer deposition (PE-ALD) system. Film depositions were carried out at a temperature range of 50–200 °C, while the plasma exposure time within the PE-ALD cycle varied from a very short time of 0.3 s to a sufficiently long time of 4.0 s. The growth per cycle, wet etch rate (WER), dielectric constant, and leakage current of as-deposited samples were significantly decreased with increas

Electrical and Electronic EngineeringEngineering
10
Article|1 citations·2014
고혈압 환자에서 순응도 개선을 위한 단기간의 휴대전화 문자메시지의 효과
이정아, 김우상, 배문정, 김영식, 오한진, 이상엽, 김철민, 신동혁, 한성호, 조경환

배경: 고혈압 진료에 있어서 혈압 관리 및 치료에 관한내용을 담은 개인 휴대전화 문자메시지를 이용하는 것이고혈압 환자의 순응도 및 생활 습관을 포함한 성과지표개선에 영향을 미치는지 알아보고자 연구를 시작하였다. 방법: 연구기간은 2008년 7월부터 2010년 6월까지이며이 기간 동안 동일한 칸데살탄 제제의 항고혈압약물을 처음 처방받은 사람 중 개인 휴대전화 메시지 발송에 동의한 사람 1,453명(남자 607명(47.8%), 여자 846명(58.2%))을 대상으로 하였다. 총 관찰 기간은 12주로 하였고 등록후 문자메시지는 2주에 1회, 총 5회(2, 4, 6, 8, 10주)에 걸쳐 조정센터에서 연구자 맹검을 위해 연구자별로 무작위 배정하여 발송하였다(메시지 발송군: 719명(49.6%): 남자 309명, 여자 410명/대조군: 730명(50.4%): 남 296명, 여 434명). 문자메시지는 항고혈압약물 복용, 운동, 저염식, 절주, 체중감량을 권유하는 내용이었고, 대조군의 경우 1

11
Article|1 citations·2022
Current understanding of SARS-CoV-2 papain-like protease inhibitors
Minhyeong Choi, Sangwoo Kang, Ane Martiartu, Donghyuk Shin
Korean Society for Structural BiologyOA

The spread of SARS-CoV-2 has been the cause of the ongoing COVID-19 global pandemic, which has increased morbidity and mortality worldwide. SARS-CoV-2 has two proteases that play an essential role in its spread, promoting replication by cleaving viral polyproteins. One of these two proteases, PLpro suppresses the host immune response through deubiquitination and deISGylation. Since PLpro plays a vital role in viral spread, there is a need for research on therapeutic agents that target it. In thi

General Health ProfessionsHealth Professions
12
Article|0 citations·1992
Microstructure and Characterisistics of Near Surface of As^+ Ion Implanted Si
Donghyuk Shin, Chang-Auk Choi, C.G. Park, J.C. Kim
SJR Q4Korean Journal of Materials Research

The microstructure, dopant distribution and electrical properties of the ion-implanted surface layer differ significantly depending on the methods of subsequent heat treatments, furnace annealing(FA) and rapid thermal annealing(RTA). The amorphous layer created by ion implantation was recrystallized during the thermal annealing through solid phase epitaxial (SPE) growth. The dopant distribution and electrical properties are discussed with respect to the TEM cross-sectional microstructure observe

Electrical and Electronic EngineeringEngineering
13
Article|0 citations·2026
Spike-based Q-learning in a non-von Neumann architecture
Donghyuk Shin, Hyeongcheol Jo, Hanwool Jang, Yoo Ho Jeong, YeonJoo Jeong, Joon Young Kwak, Jongkil Park, Sanjo Lee, Inho Kim, Jong‐Keuk Park, Seongsik Park, Hyun Jae Jang
SJR Q2Frontiers in NeuroscienceOA

Non-von Neumann architectures overcome the memory-compute separation of von Neumann systems by distributing computation and memory locally, thereby reducing data-transfer bottlenecks and power consumption. These features are particularly advantageous for reinforcement learning (RL) workloads that rely on frequent value-function updates across large state-action spaces. When combined with event-driven spiking neural networks (SNNs), non-von Neumann architectures can further improve overall comput

Electrical and Electronic EngineeringEngineering
14
Article|0 citations·2025
A Cross-Cultural Analysis on Conceptual Metaphors Used in the Written Reports of Disease Outbreak by Mainstream Media
Jing Sun, Young-Ok Hwang, Donghyuk Shin
SJR Q2Korean Journal of English Language and Linguistics

This article compares conceptual metaphors related to COVID-19 as manifested in the written reports of mainstream media in China and the United States. According to the three steps of critical metaphor analysis proposed by Charteris-Black (2004), 12 conceptual metaphors in People’s Daily and 13 conceptual metaphors in The New York Times were identified separately by making use of two self-built corpora. The reasons for employing similar and different conceptual metaphors in the coverage of two m

Experimental and Cognitive PsychologyPsychology
15
Article|0 citations·2012
Identification of Derivatives of Cobalt-binding BLM-A2 by NMR
Seongeon Lee, Donghyuk Shin, Sun‐Hee Woo, Hoshik Won
Journal of the Korean Magnetic Resonance SocietyOA

Three different derivatives were obtained in the synthesis of cobalt-binding BLM-A2 and characterized by NMR and Mass spectrometry. It was found that Component 1 is Co(II)(<TEX>$2H_2O$</TEX>)(BLM-A2), component 2 is Co(III)(<TEX>$OOH^-$</TEX>)(BLM-A2) and component 3 is Co(III)(<TEX>$H_2O$</TEX>)(<TEX>$OH^-$</TEX>)(BLM-A2), respectively. Component 2 and 3 were interestingly dominated when CoBLM-A2 complex was synthesized under basic condition. In this experiment, it was revealed newly that the b

NeurologyNeuroscience

Research Areas

Electrical and Electronic EngineeringNeurologyAtomic and Molecular Physics, and OpticsMolecular BiologyGeneral Health ProfessionsImmunology

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