Yeonghun Kang
Sungkyunkwan University · 材料科学
研究室紹介
Professor Yeonghun Kang's research lab specializes in the development and characterization of advanced functional thin films, particularly zinc oxide (ZnO)-based materials for microelectromechanical systems (MEMS) and spintronic applications. The lab focuses on optimizing pulsed DC magnetron sputtering and atomic layer deposition techniques to fabricate high-quality ZnO and Co-doped ZnO films with controlled crystallographic orientation, electrical properties, and optical transparency. Key research directions include the integration of buffer layers such as Ru for enhanced film quality, the investigation of thermal annealing effects on microstructure and electrical performance, and the exploration of diluted magnetic semiconductors for spintronic devices. The lab also examines the optical and magnetic behavior of Co-doped ZnO films, particularly the influence of substrate temperature on structural, optical, and magnetic properties, aiming to enable next-generation nanoscale devices with tailored functionalities.
Research Overview
Research Output Trend
Figures are computed from collected data and may differ slightly.
Selected Papers
4본 연구에서는 FBAR(Film Bulk Acoustic Resonator) 응용을 위해 pulse DC magnetron sputtering법을 이용하여 ZnO 박막을 제조하였다. Al(300 nm)/SiO2(500 nm)/Si 기판 위에 buffer layer로써 Ru 박막을 evaporation 법을 이용하여 30 nm 두께로 증착시키고 그 위에 ZnO를 1.5 ㎛ 두께로 증착하였다. 그리고 25℃에서 500℃의 온도에서 열처리를 실시하여 온도에 따른 ZnO 박막의 전기적 특성 및 미세조직의 변화를 관찰하였다. 제작된 ZnO 박막은 전체적으로 열처리온도가 높을수록 높은 비저항값과 우수한 c-축 우선 배향성을 보여주었다. 최종 단일 공진기를 제작한 결과 0.99 GHz 공진주파수와 반사계수 15 dB의 양호한 주파수 특성을 보였다. 이번 실험을 통하여 Ru buffer layer의 활용 가능성과 전기적 특성의 향상을 위한 최적의 열처리 온도를 확인하였다.
We studied the microstructure and magnetic property of the pulsed DC magnetron sputtered Zn0.8Co0.2O film as a function of substrate temperatures. The X-ray patterns of the Zn0.8Co0.2O film showed a strong (002) preferential orientation at 500℃. The films with a crystallite size of 23-35 nm were grown in the form of nano-sized structure and this tendency was remarkable with increasing substrate temperature. The UV-visible result showed that the Zn0.8Co0.2O film prepared above 300℃ has a high opt