신동혁 교수
Donghyuk Shin
연세대학교 시스템생물학과 · 공학
연구실 소개
신동혁 교수의 연구실은 반도체 소자 기술의 핵심인 메모리 및 인터커넥트 소재의 고도화를 목표로 하며, 특히 70nm 이하의 초미세 공정에서 우수한 성능을 발휘하는 DRAM 구조 설계와 고도화된 ALD(원자층증착) 공정 기술을 중심으로 연구를 진행하고 있습니다. S-RCAT와 6F² 오픈비트라인 구조를 통해 소자 스케일링의 도전 과제를 해결하고, TiO₂, SiO₂, Mo 등의 산화물 및 금속막을 정밀 제어하여 전기적·물리적 특성을 최적화하는 데 초점을 맞추고 있습니다. 또한, 생물학적 타겟과의 상호작용을 분석하는 생물정보학적 접근까지 융합한 다학제적 연구를 수행하고 있습니다.
연구 현황
연구 성과 추이
표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.
주요 논문
15For the first time, S-RCAT (sphere-shaped-recess-channel-array transistor) technology has been successfully developed in a 2Gb density DRAM with 70nm feature size. It is a modified structure of the RCAT (recess-channel-array transistor) and shows an excellent scalability of recessed-channel structure to sub-50nm feature size. The S-RCAT demonstrated superior characteristics in DIBL, subthreshold swing (SW), body effect, junction leakage current and data retention time, comparing to the RCAT stru
For the first time, the DRAM device composed of 6F/sup 2/ open-bit-line memory cell with 80nm feature size is developed. Adopting 6F/sup 2/ scheme instead of customary 8F/sup 2/ scheme made it possible to reduce chip size by up to nearly 20%. However, converting the cell scheme to 6F/sup 2/ accompanies some difficulties such as decrease of the cell capacitance, and more compact core layout. To overcome this strict obstacles which are originally stemming from the conversion of cell scheme to 6F/s
Titanium dioxide (TiO2) films were deposited by plasma enhanced atomic layer deposition (PE-ALD) system using tetrakis-dimethylamido-titanium (TDMAT) at 250 °C. We applied a new source feeding method, known as Discrete Feeding Method (DFM), to PE-ALD TiO2 process for comparing the deposition rate, the physical and electrical film properties with the films deposited by conventional ALD method. Various analytical studies were carried out to investigate the change of TiO2 thin film characteristics
Challenges have arisen in selecting suitable candidates for interconnects and metal contacts due to the exponential increase in metal resistivity at scaled pitches. Molybdenum (Mo) has emerged as a promising alternative to the traditional metals such as copper or tungsten owing to its low electrical resistivity and electron mean free path. In this study, we investigated the formation of a molybdenum film grown by thermal atomic layer deposition (ALD) using a MoO2Cl2 solid precursor and H2 and NH
ABSTRACT Although ubiquitin is found only in eukaryotes, several pathogenic bacteria and viruses possess proteins that hinder the host ubiquitin system. Legionella , a gram-negative intracellular bacterium, possesses an ovarian tumor (OTU) family of deubiquitinases (Lot DUBs). Herein, we describe the molecular characteristics of Lot DUBs. We elucidated the structure of LotA OTU1 domain and revealed that entire Lot DUBs possess a characteristic extended helical lobe (EHL) that is not found in oth
Silicon dioxide films were deposited using di-isopropylaminosilane and Ar/O2 plasma by the plasma enhanced atomic layer deposition (PE-ALD) system. Film depositions were carried out at a temperature range of 50–200 °C, while the plasma exposure time within the PE-ALD cycle varied from a very short time of 0.3 s to a sufficiently long time of 4.0 s. The growth per cycle, wet etch rate (WER), dielectric constant, and leakage current of as-deposited samples were significantly decreased with increas
The spread of SARS-CoV-2 has been the cause of the ongoing COVID-19 global pandemic, which has increased morbidity and mortality worldwide. SARS-CoV-2 has two proteases that play an essential role in its spread, promoting replication by cleaving viral polyproteins. One of these two proteases, PLpro suppresses the host immune response through deubiquitination and deISGylation. Since PLpro plays a vital role in viral spread, there is a need for research on therapeutic agents that target it. In thi
배경: 고혈압 진료에 있어서 혈압 관리 및 치료에 관한내용을 담은 개인 휴대전화 문자메시지를 이용하는 것이고혈압 환자의 순응도 및 생활 습관을 포함한 성과지표개선에 영향을 미치는지 알아보고자 연구를 시작하였다. 방법: 연구기간은 2008년 7월부터 2010년 6월까지이며이 기간 동안 동일한 칸데살탄 제제의 항고혈압약물을 처음 처방받은 사람 중 개인 휴대전화 메시지 발송에 동의한 사람 1,453명(남자 607명(47.8%), 여자 846명(58.2%))을 대상으로 하였다. 총 관찰 기간은 12주로 하였고 등록후 문자메시지는 2주에 1회, 총 5회(2, 4, 6, 8, 10주)에 걸쳐 조정센터에서 연구자 맹검을 위해 연구자별로 무작위 배정하여 발송하였다(메시지 발송군: 719명(49.6%): 남자 309명, 여자 410명/대조군: 730명(50.4%): 남 296명, 여 434명). 문자메시지는 항고혈압약물 복용, 운동, 저염식, 절주, 체중감량을 권유하는 내용이었고, 대조군의 경우 1
Non-von Neumann architectures overcome the memory-compute separation of von Neumann systems by distributing computation and memory locally, thereby reducing data-transfer bottlenecks and power consumption. These features are particularly advantageous for reinforcement learning (RL) workloads that rely on frequent value-function updates across large state-action spaces. When combined with event-driven spiking neural networks (SNNs), non-von Neumann architectures can further improve overall comput
The microstructure, dopant distribution and electrical properties of the ion-implanted surface layer differ significantly depending on the methods of subsequent heat treatments, furnace annealing(FA) and rapid thermal annealing(RTA). The amorphous layer created by ion implantation was recrystallized during the thermal annealing through solid phase epitaxial (SPE) growth. The dopant distribution and electrical properties are discussed with respect to the TEM cross-sectional microstructure observe
Abstract Parkinson’s disease (PD) is characterized by progressive neurodegeneration and is marked by the formation of Lewy bodies, which are intracellular aggregates primarily composed of α-synuclein. Mitochondrial dysfunction and impaired protein degradation pathways play critical roles in the progression of PD, contributing to the loss of dopaminergic neurons in the substantia nigra . Phosphorylation of α-synuclein promotes its aggregation, underscoring its role in disease progression. Parkin,
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