윤준영 교수

This paper presents the design, construction, and testing of a low-noise high-force double-sided linear iron-core motor for high-precision and high-throughput system applications such as in semiconductor photo-lithography machines. Linear iron-core permanent-magnet motors can emit significant vibration and acoustic noise due to high spatial-frequency force harmonics, causing harmonic vibrations of a moving stage. As a design solution to such motor noise, we presented magnetic designs of a new li

The design of a novel low-noise high-force linear motor for precision positioning applications, such as in semiconductor lithography, is presented in this paper. New magnetic designs achieve low noise and vibration by reducing high spatial-frequency magnetic field components, which cause harmonic vibrations of a moving stage. To reduce such force harmonic content, our new motor has fine teeth, narrow slots with high slot aspect ratio, five phases, and a moving skewed Halbach magnet array. As com

This paper presents the design, fabrication, and testing of two linear stages for next generation precision mechatronic motion systems such as in semiconductor photolithography machines. We have designed a new linear iron-core permanent-magnet motor that can simultaneously achieve high force and low noise, providing a promising candidate for actuating systems for high-throughput and high-precision servo applications. The vibro-acoustic noise mechanism of linear iron-core synchronous motors and a

This study investigates how improvements in energy efficiency (EE) contribute to the sustainable growth rate (SGR) of manufacturing firms. Using panel data from Chinese A-share listed companies between 2012 and 2023, we provide empirical evidence that higher EE significantly enhances firms’ ability to maintain long-term and stable growth. Furthermore, the findings reveal that executives’ green perception (EGP) and environmental protection investment (EPI) strengthen this positive relationship, w

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.

Abstract The fabricated power coupler is a coaxial capacitive-type coupler based on a conventional 3 1/8-inch Electronic Industries Alliance 50-Ω coaxial transmission line with a titanium nitride (TiN)-coated ceramic disk window. A high-power test in a standing wave was performed with the 20 kW and 325 MHz solid-state power amplifier (SSPA). The standing wave test is similar to the RF conditioning condition of the cavity before beam operation. It is also possible to adjust the position of the ma