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조만호 교수

Man-ho Cho

연세대학교 물리학과 · 재료과학

연구실 소개

조만호 교수의 연구실은 반도체 소자에서 핵심적인 역할을 하는 산화막 및 이(tf)막의 물성 제어와 나노구조 제작을 중심으로 연구를 진행하고 있습니다. 특히, 실리콘 기반 산화물 및 산화질화물 박막의 화학적 조성, 에너지 밴드 구조, 전자적 특성 변화를 고해상도 분석 기법을 통해 규명하고 있으며, 이는 고성능 트랜지스터 및 메모리 소자 개발에 기여하고 있습니다. 또한, 페로일렉트릭, 반도체 산화물, 도핑된 산화물 등 다양한 물질을 활용한 광학 및 전기적 특성 제어 연구도 활발히 진행되고 있습니다.

산화막 물성 제어반도체 박막저항성 메모리광학적 특성 제어나노구조 전자소자

연구 현황

논문 수
20
총 인용 수
60
최근 5년 논문
5
주요 분야
재료과학

연구 성과 추이

표시된 성과는 수집된 데이터 기준으로 산출되며, 일부 차이가 있을 수 있습니다.

5개년 연도별 논문 게재 수
5총합
2016
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5개년 연도별 피인용 수
0총합
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주요 논문

15
1
논문|인용수 9·1997
Heteroepitaxial growth of Y2O3 films on Si(100) by reactive ionized cluster beam deposition
Sunghoon Choi, M.H. Cho, S. W. Whangbo, C. N. Whang, C. E. Hong, N. Y. KIM, Jinyoung Jeon, S. I. Lee, M. Y. Lee
SJR Q3Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Electronic, Optical and Magnetic MaterialsMaterials Science
2
논문|인용수 8·2011
Effect of Incorporated Nitrogen on the Band Alignment of Ultrathin Silicon-oxynitride Films as a Function of the Plasma Nitridation Conditions
C. J. Yim, 고대홍, S. H. Park, W. J. Lee, 조만호

The effects of plasma nitridation conditions, including substrate temperature (room temperature or high temperature) and plasma source gas (N_2 or NH_3), on the energy band characteristics and the chemical states of ultrathin SiON films was studied by using reflection electron energy loss spectroscopy (REELS) and X-ray photoelectron spectroscopy (XPS). The depth profile of nitrogen incorporated in the SiON films as a function of the above conditions was examined using mediumenergy ion scattering

3
논문|인용수 7·2013
Hall Mobility Manipulation in TiO2−x Semiconductor Films by Hydrogen-ion Irradiation
C. S. Yeo, 정권범, J.H.Song, K.H.Chae, 박진성, J-H. Song, 박상한, 조만호

The effects of different irradiation doses of hydrogen ions on TiO<SUB>2-x</SUB> oxide semiconductor films were investigated.쟕he total doses were controlled between ~10<SUP>14</SUP> and ~10<SUP>15</SUP> atom/cm<SUP>2</SUP> at acceleration energy of 110 keV.?Hall mobility was manipulated with changing irradiation dose, while carrier concentration did not.쟕he amorphous crystal structure was consistently maintained upon irradiation. The electronic structures of molecular orbitals in the conduction

4
논문|인용수 7·2013
The diffusion of silicon atoms in stack structures of La2O3 and Al2O3
W.J. Lee, J.W. Ma, 배정민, C.Y. Kim, 정광식, 조만호, 정권범, H. Kim, H.J. Cho, D.C. Kim

The interfacial reactions and electrical characteristics of stack structures of La2O3 and Al2O3 were investigated as a function of the annealing temperature. In the case of Al2O3/La2O3/Si (ALO structure), the La2O3 in contact with the Si substrate was readily transformed into La-silicate by the diffusion of Si atoms, while in the case of La2O3/Al2O3/Si (LAO structure), interfacial reactions between the Al2O3 layer and the Si substrate were suppressed. After an annealing treatment at 700 C, the A

5
논문|인용수 6·1998
RBS/channeling studies on the heteroepitaxially grown Y2O3 film on Si(100)
H.B. Kim, M.H. Cho, S. W. Whangbo, C. N. Whang, Sung‐Churl Choi, Won Kook Choi, Jieyuan Song, S.O. Kim
SJR Q2Thin Solid Films
Electronic, Optical and Magnetic MaterialsMaterials Science
6
논문|인용수 5·2011
Luminescent mechanism of Eu^3+-doped epitaxial Gd_2O_3 films grown on a Si (111) substrate using an effusion cell
장문형, Yoon Ki Choi, 정권범, 전형탁, 조만호

Eu^3+-doped epitaxial Gd_2O_3 (111) films with well-ordered crystalline structures were grown on oxidized Si (111) using the physical vapor deposition method. The mole fraction (x) of Eu^3+ in Gd_(2-x)O_3:Eu^3+_x ranged from 0.02 to 0.22. The photoluminescence characteristics, measured at an excitationwavelength of 254 nm,showed that even at the very low Eu^3+ concentration, x = 0.18, the 5^D_0 → 7^F_2 transition occurred at the maximum612-nm emission. Based on the critical distance calculated u

7
논문|인용수 5·1998
Oxygen distribution in the heteroepitaxially grown Y2O3 films on Si substrates
H.B. Kim, M.H. Cho, S. W. Whangbo, C. N. Whang, Seok Cheol Choi, W. K. Choi, Jieyuan Song, S.O. Kim
SJR Q3Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Electronic, Optical and Magnetic MaterialsMaterials Science
8
논문|인용수 5·2012
High-mobility Property of Crystallized In-Te Chalcogenide Materials
Sung Jin Park, Seung-Jong Park, Dambi Park, Min An, 조만호, Jonggi Kim, Heedo Na, Sung hoon Park, 손현철

In-Te films were deposited by ion beam sputtering deposition (IBSD) using In and Te targets. The crystallization characteristics of the resulting films were investigated by 4-point Rs measurement, x-ray diffraction (XRD),transmission electron microscopy (TEM), and the Hall-effect measurement system. As the amount of In was increased in In-Te, the crystallization temperature increased. X-ray data for the crystalline structure show that phase separation to In2Te3 and InTe occurred in InTe and In3T

9
논문|인용수 4·1997
Physical properties of Y 2O 3 films fabricated by the reactive ionized cluster beam deposition technique
Sunghoon Choi, M. H. Cho, S. W. Whangbo, C. N. Whang, Jinyoung Jeon, S. I. Lee, M. Y. Lee
SJR Q3Journal of the Korean Physical Society
Electronic, Optical and Magnetic MaterialsMaterials Science
10
논문|인용수 1·2005
Resistivity image reconstruction using J-substitution algorithm for MREIT
Oh In Kwon, Jin Keun Seo, Eun Jin Woo, J.R. Yoon, S.Y. Lee, M.H. Cho

We describe a new resistivity image reconstruction algorithm called J-substitution algorithm. It utilizes internal current density data measured by MRI technique with current injection. Computer simulations show that Magnetic Resonance Electrical Impedance Tomography (MREIT) system using J-substitution algorithm can produce high-resolution static resistivity images of a subject.

Electrical and Electronic EngineeringEngineering
11
논문|인용수 1·2010
Growth of Amorphous Silicon Oxide Nanowires in the Absence of a Si Precursor through a Solid State Transformation
송진호, D. H. Lim, J. P. Ann, E. S. Oh, J. G. Kim, 손현철, 고대홍, 조만호

Amorphous silicon oxide nanowires (a-SiONWs) were prepared by heating a silicon substrate in the absence of any silicon source. To investigate the mechanism of this growth, we experimented with a variety of growth conditions, including the condition of the substrate and the growth ambient. The distribution of the density of a-SiONWs increased when titanium was present during the operation process. The results as a function of the temperature indicate that the growth mechanism for the high-temper

12
논문|인용수 1·2012
Change of resistive-switching in TiO2 films with additional HfO2 thin layer
Doosung Lee, Yonghun Sung, 손현철, 고대홍, 조만호

We have fabricated TiN/(HfO2)/TiO2/Pt/Ti stacks on SiO2/Si substrates and investigated the characteristics of the bipolar resistive switching of those stacks. Compared to the single TiO2 structure, more stable bipolar switching in the current-voltage curve was accomplished in the HfO2/TiO2 structure. We obtained a smaller range of SET variation, a larger sensing margin, and higher resistance values of the high-resistance state with an additional HfO2 layer. Especially, in the case of the HfO2/Ti

13
논문|인용수 1·2012
Temperature-dependent Catalyst-free Growth of ZnO Nanostructures on Si and SiO2/Si Substrates via Thermal Evaporation
김효진, Sang Han Park, 이우정, 배정민, 채지민, 조만호

The catalyst-free growth of ZnO nanostructures on Si and SiO2/Si substrates as a function of substrate temperature was carried out using a thermal evaporation method. We observed that the shapes and the morphologies of the ZnO nanostructures could be controlled by using the substrate temperature and the presence of an oxide layer on the surface of the substrate. The shape of the ZnO nanostructure was changed from an embossed nanocantilever to a nanowire as the growth temperature was decreased fr

14
dataset|인용수 0·2018
CCDC 1818713: Experimental Crystal Structure Determination
Shun Hirasawa, M.H. Cho, Tarsis F. Brust, Jeremy J. Roach, Laura Bohn, Ryan A. Shenvi
The Cambridge Structural DatabaseOA

An entry from the Cambridge Structural Database, the world’s repository for small molecule crystal structures. The entry contains experimental data from a crystal diffraction study. The deposited dataset for this entry is freely available from the CCDC and typically includes 3D coordinates, cell parameters, space group, experimental conditions and quality measures.

Materials ChemistryMaterials Science
15
논문|인용수 0·2016
Electronic Structure of Ce-doped ZrO2 Film: Study of DFT Calculation and Photoelectron Spectroscopy
정광식, 송진호, 임동혁, 김형섭, 조만호

In this study, we evaluated the change of electronic structure during redox process in cerium-doped ZrO2 grown by sol gel method. By sol-gel method, we could obtain cerium-doped ZrO2 in high oxygen partial pressure and low temperature. After post annealing process in nitrogen ambient, the film is deoxidized. We used spectroscopic and theoretical methods to analysis change of electronic structure. X-ray absorption spectroscopy (XAS) for O K1-edge and Density Functional Theory (DFT) calculation us

대표 연구 분야

Electronic, Optical and Magnetic MaterialsElectrical and Electronic EngineeringMaterials Chemistry

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